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Veeco Instruments Executive Compensation (FY25)

VECO · Executive and director compensation, fiscal 2022 to 2025
Data as of September 7, 2026Latest filing (8-K): May 7, 2026
208 figures on this page: 197 cited to the filing that reported them, 11 calculated from figures it prints. See the citations
William Miller was paid $4,624,824 in total compensation as Chief Executive Officer for fiscal 2025, and compared with the $6,866,618 reported for fiscal 2024, Miller's total was 32.6% lower. The say-on-pay proposal drew 99.5% support at the meeting held May 7, 2026 for fiscal 2025. Companies named in the disclosed peer group include 3D Systems Corporation, Axcelis Technologies, Inc., Badger Meter, Inc., Cohu, Inc. and FARO Technologies, Inc., among others. The fiscal 2025 disclosure covers 5 named executive officers.
Chief executive, fiscal 2025
William Miller
Latest say-on-pay support
=
May 7, 2026
Chief executive pay ratio
To the median employee
What changed from fiscal 2024 to fiscal 2025
The figures that moved, and by how much. Analysis of these figures is part of the Velarion platform.
Chief executive total compensation — William Miller: $6,866,618$4,624,824 (32.6% lower)

Frequently asked questions

Answers drawn from the data on this page.
Who is Veeco Instruments' chief executive and what were they paid?
William Miller was paid $4,624,824 in total compensation as Chief Executive Officer for fiscal 2025. Compared with the $6,866,618 reported for fiscal 2024, Miller's total was 32.6% lower.
What was Veeco Instruments' say-on-pay result?
The say-on-pay proposal drew 99.5% support at the meeting held May 7, 2026 for fiscal 2025.
Which companies are in Veeco Instruments' peer group?
Companies named in the disclosed peer group include 3D Systems Corporation, Axcelis Technologies, Inc., Badger Meter, Inc., Cohu, Inc. and FARO Technologies, Inc., among others.
What is Veeco Instruments' chief executive pay ratio?
The company reported a chief executive pay ratio of 39.2:1 for fiscal 2025, against median employee compensation of $118,039.

Executive compensation

Every element reported for each named executive officer, by fiscal year.
Fiscal 2022
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
William Miller
President and Chief Executive Officer
John Kiernan
Senior Vice President, Finance and Chief Financial Officer
Susan Wilkerson
Senior Vice President, Global Operations
Peter Porshnev
Senior Vice President and General Manager, Semiconductor
Adrian Devasahayam
Senior Vice President, CTO and General Manager, Advanced Packaging, Display and Scientific
Fiscal 2023
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
William Miller
Chief Executive Officer
John Kiernan
Senior Vice President, Chief Financial Officer
Susan Wilkerson
Senior Vice President, Global Sales & Services
Peter Porshnev
Senior Vice President, Unified Engineering
Fiscal 2024
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
William Miller
Chief Executive Officer
John Kiernan
Senior Vice President, Chief Financial Officer
Susan Wilkerson
Senior Vice President, Global Sales & Services
Peter Porshnev
Senior Vice President, Unified Engineering
Adrian Devasahayam
Senior Vice President, Product Line Management
Fiscal 2025
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
William Miller
Chief Executive Officer
John Kiernan
Senior Vice President, Chief Financial Officer
Peter Porshnev
Senior Vice President, Unified Engineering
Susan Wilkerson
Senior Vice President, Global Sales & Services
Adrian Devasahayam
Senior Vice President, Product Line Management
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero. A negative change in pension value is shown but, as the company reports it, not included in the total.

Equity awards granted

Individual awards as disclosed: type, date, unit counts at each level, and grant date value.
Fiscal 2025
OfficerAwardGrant dateThreshold unitsTarget unitsUnits grantedMaximum unitsExercise priceGrant date fair value
Adrian DevasahayamPSU
Adrian DevasahayamRSU
John KiernanRSU
John KiernanPSU
William MillerRSU
William MillerPSU
Fiscal 2024 are included in the PDF.
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero. Threshold, target and maximum apply only to performance awards and are never shown for time-based or option awards.

Outstanding awards

Awards still held at fiscal year end.
As disclosed at fiscal 2025 year end
OfficerAwardUnvested unitsMarket value of unvested unitsExercise priceExpires
A. DevasahayamRSU
PSU
P. PorshnevRSU
PSU
W. MillerRSU
PSU
J. KiernanRSU
PSU
S. WilkersonPSU
RSU
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero.

Director compensation

What each non-employee director was paid.
Fiscal 2025
DirectorFees earned in cashStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Richard A. D'Amore
Kathleen A. Bayless
Gordon Hunter
Keith D. Jackson
Thomas St. Dennis
Mary Jane Raymond
Sujeet Chand
Lena Nicolaides
William J. Miller served on the board in fiscal 2025 and received no compensation for board service. Executive directors are typically paid through their executive roles, shown above.
Earlier years are included in the PDF.
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero.

Director fee schedule

The standing retainers and premiums the board pays, as published.
Board cash retainer
Board equity retainer
Total board retainer
Board chair premium
Compensation committee chair
Compensation committee member
Equity is delivered as Restricted Stock.
Stock ownership guideline: 3x annual cash retainers

Disclosed peer group

The companies this board named as its compensation comparison group. The list is disclosure; the comparison is analysis.
Fiscal 2025
  • 3D Systems Corporation DDD
  • Axcelis Technologies, Inc. ACLS
  • Badger Meter, Inc. BMI
  • Cohu, Inc. COHU
  • FARO Technologies, Inc. FARO
  • FormFactor, Inc. FORM
  • Ichor Holdings Ltd. ICHR
  • Kulicke and Soffa Industries, Inc. KLIC
  • Lattice Semiconductor Corporation LSCC
  • MACOM Technology Solutions MTSI
  • MaxLinear, Inc. MXL
  • Onto Innovation, Inc. ONTO
  • OSI Systems, Inc. OSIS
  • Photronics, Inc. PLAB
  • Power Integrations, Inc. POWI
  • Quantum Corporation QMCO
  • Rambus Inc. RMBS
  • Semtech Corporation SMTC
  • Universal Display Corporation UVV
  • Vishay Precision Group, Inc. VPG

Say-on-pay history

Shareholder support for the compensation program, by year.
YearMeetingSupportVotes forVotes againstAbstentions
2025May 7, 2026=
2024May 8, 2025=
2023May 9, 2024=
2022May 12, 2023=
2021May 12, 2022=
2020May 6, 2021=
2019May 7, 2020=
2018May 3, 2019=
2017May 3, 2018=
2016May 4, 2017=
2015May 5, 2016=

Chief executive pay ratio

As calculated and reported by the company.
Ratio
Median employee compensation
Chief executive total compensation
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What this page does not include

Everything above is a fact Veeco Instruments disclosed, and it is free. Everything below is our analysis of those facts, and it is not.
Peer benchmarking
Where Veeco Instruments sits against its disclosed peers — percentile position by role and by pay element, and the ranking behind it. The disclosed peer group is free; comparisons across it are part of the Velarion platform.
Executive Compensation Report — $1,500
Written compensation analysis
A read of the pay program as designed and as paid: incentive structure, goal rigor, the alignment between the committee's stated philosophy and what the numbers show.
Executive Compensation Report — $1,500
Board and governance analysis
Committee composition, independence, director pay positioning, and the governance provisions read together rather than listed.
Board Governance Report — $1,200
Realizable pay
What the awards above are actually worth today against what they were valued at on grant, and what the gap says about the pay-for-performance link.
Velarion Intelligence
Adviser switching and vote outcomes
Two datasets covering compensation-adviser changes and what followed a contested vote. Both are part of the Velarion platform.
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Citations

Every figure on this page is cited to the document that reported it. Select any figure to see its citation.
208 figures on this page: 197 cited to the filing that reported them, 11 calculated from figures it prints.
197 cited to the filing
11 calculated from the filing

Documents cited

  1. 0001104659-26-057170
  2. 0001104659-26-032085
    Compensation of Directors · Grants of Plan-Based Awards · Outstanding Equity Awards at Fiscal Year End · Summary Compensation Table
  3. 0001104659-25-046126
  4. 0001104659-25-026137
    Summary Compensation Table
  5. 0001104659-24-059911
  6. 0001104659-24-037293
    Summary Compensation Table
  7. 0001104659-23-059754
  8. 0001104659-23-036067
    Summary Compensation Table
  9. 0001104659-22-059438
  10. 0001104659-21-063092
  11. 0001558370-20-005705
  12. 0001558370-19-004080
    Item 5.07 Submission of Matters to a Vote of Security Holders
  13. 0001104659-18-030906
    Item 5.07 Submission of Matters to a Vote of Security Holders
  14. 0001104659-17-029893
    Item 5.07 Submission of Matters to a Vote of Security Holders
  15. 0001104659-16-118764
    Item 5.07 Submission of Matters to a Vote of Security Holders
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Velarion, “Veeco Instruments executive compensation, FY2022–FY2025.” https://intel.velarion.ai/comp/VECO (accessed 2026).
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Tech — Hardware rankings

Chief executive payTech — HardwareCEO pay ratioTech — HardwareSay-on-pay supportTech — Hardware

Peers Veeco Instruments discloses

The companies named in VECO's own disclosed peer group.

Axcelis Technologies, Inc.Cohu, Inc.FormFactor, Inc.Ichor Holdings Ltd.Kulicke and Soffa Industries, Inc.Lattice Semiconductor CorporationMACOM Technology SolutionsMaxLinear, Inc.OSI Systems, Inc.Photronics, Inc.Power Integrations, Inc.Rambus Inc.Semtech Corporation

Terms on this page

Say-on-Pay VoteCEO Pay RatioMedian Employee CompensationAll companies
Cite this data
APA
Velarion Company Intelligence. (2026). Velarion database: executive and board compensation data (Version 2026Q3) [Data set]. Zenodo. https://doi.org/10.5281/zenodo.22283854
BibTeX
@misc{velarionData2026,
  author = {{Velarion Company Intelligence}},
  title = {Velarion database: executive and board compensation data},
  year = {2026},
  version = {2026Q3},
  doi = {10.5281/zenodo.22283854},
  publisher = {Zenodo},
  url = {https://doi.org/10.5281/zenodo.22283854}
}
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