V
Velarion™Intelligence
Sign InFree TrialBook a Walkthrough

Onto Innovation Executive Compensation (FY25)

ONTO · Wilmington, MA · Executive and director compensation, fiscal 2022 to 2025

The Onto Innovation brief, $1,500

Positioning against its disclosed peers, the governance read, incentive design, and the CD&A alignment analysis; the full peer table; a committee-ready PDF.
From $1,200 for the board report; $2,400 for both.
Data as of September 7, 2026Latest filing (8-K): May 20, 2026
15 filings cited on this page
A report that fails to generate is refunded in full
Published by Velarion Company Intelligence
Onto Innovation brief$1,500Get the executive brief
288 figures on this page: 278 cited to the filing that reported them, 10 calculated from figures it prints. See the citations
Chief executive, fiscal 2025
◇
Michael Plisinski
Median of the other named officers
$2,929,602
5 officers, excluding the chief executive
Latest say-on-pay support
=
May 20, 2026
Chief executive pay ratio
◇
To the median employee
What changed from fiscal 2024 to fiscal 2025
The figures that moved, and by how much. Analysis of these figures is part of the Velarion platform.
Chief executive total compensation — Michael Plisinski: $6,961,766 → $7,813,551 (12.2% higher)
Say-on-pay support: 96.4% → 97.1% (0.7 points higher)
CEO pay ratio: 67:1 → 63:1 (6.0% lower)

Frequently asked questions

Answers drawn from the data on this page.
Who is Onto Innovation's chief executive and what were they paid?
Total compensation for Michael Plisinski, Chief Executive Officer, came to $7,813,551 in fiscal 2025. Compared with the $6,961,766 reported for fiscal 2024, Plisinski's total was 12.2% higher.
What was Onto Innovation's say-on-pay result?
Shareholders supported the say-on-pay proposal with 97.1% of votes cast for or against in favor at the meeting held May 20, 2026 for fiscal 2025.
Which companies are in Onto Innovation's peer group?
The disclosed peer group includes Advanced Energy Industries Inc., Allegro MicroSystems, Inc., Axcelis Technologies, Inc., Cognex Corporation and Cohu, Inc., among others.
What is Onto Innovation's chief executive pay ratio?
For fiscal 2025, the company reported a chief executive pay ratio of 63:1, against median employee compensation of $123,868.

Executive compensation

Every element reported for each named executive officer, by fiscal year.
Fiscal 2022
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Michael Plisinski
Chief Executive Officer
◇—◇—◇—◇◇
Mark Slicer
Chief Financial Officer
◇◇◇—◇—◇◇
Yoon Ah E. Oh
Vice President, General Counsel, and Corporate Secretary
◇—◇—◇—◇◇
James Harlow
Chief Operating Officer
◇—◇—◇—◇◇
Steven Roth
Former Senior Vice President, Finance & Administration and Chief Financial Officer
◇—◇—◇—◇◇
Robert Fiordalice
Senior Vice President & General Manager, Metrology Business Unit
◇—◇—◇—◇◇
Fiscal 2023
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Michael Plisinski
Chief Executive Officer
◇—◇—◇—◇◇
Mark Slicer
Chief Financial Officer
◇◇◇—◇—◇◇
Yoon Ah Oh
Vice President, General Counsel, and Corporate Secretary
◇—◇—◇—◇◇
James Harlow
Chief Operating Officer
◇—◇—◇—◇◇
Steven Roth
Former Senior Vice President, Finance & Administration and Chief Financial Officer
Departed during or after this year
◇—◇—◇—◇◇
Robert Fiordalice
Senior Vice President & General Manager, Metrology Business Unit
◇—◇—◇—◇◇
Fiscal 2024
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Michael Plisinski
Chief Executive Officer
◇—◇—◇—◇◇
Mark Slicer
Chief Financial Officer
◇—◇—◇—◇◇
Yoon Ah Oh
Senior Vice President, General Counsel, and Corporate Secretary
◇—◇—◇—◇◇
Ramil Yaldaei
Chief Operating Officer
◇—◇—◇—◇◇
Srinivas Vedula
Senior Vice President, Customer Success
◇—◇—◇—◇◇
Fiscal 2025
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Michael Plisinski
Chief Executive Officer
◇◇◇—◇—◇◇
Ido Dolev
Executive Vice President, Product Solutions Group
◇◇◇—◇—◇◇
Brian Roberts
Chief Financial Officer
◇◇◇—◇—◇◇
Mark Slicer
Former Senior Vice President, Chief Financial Officer
Departed during or after this year
◇—◇———◇◇
Shirley Chen
Senior Vice President, Customer Success
◇—◇—◇—◇◇
Ramil Yaldaei
Chief Operating Officer
◇—◇—◇—◇◇
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero. A negative change in pension value is shown but, as the company reports it, not included in the total.

Equity awards granted

Individual awards as disclosed: type, date, unit counts at each level, and grant date value.
Fiscal 2025
OfficerAwardGrant dateThreshold unitsTarget unitsUnits grantedMaximum unitsExercise priceGrant date fair value
Brian K. RobertsRSU◇——◇——◇
Ido DolevPSU◇◇◇—◇—◇
Ido DolevRSU◇——◇——◇
Mark R. SlicerRSU◇——◇——◇
Mark R. SlicerPSU◇◇◇—◇—◇
Michael P. PlisinskiPSU◇◇◇—◇—◇
Michael P. PlisinskiRSU◇——◇——◇
Ramil YaldaeiRSU◇——◇——◇
Ramil YaldaeiPSU◇◇◇—◇—◇
Shirley ChenRSU◇——◇——◇
Fiscal 2022, 2023, 2024 are included in the PDF.
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero. Threshold, target and maximum apply only to performance awards and are never shown for time-based or option awards.

Outstanding awards

Awards still held at fiscal year end.
As disclosed at fiscal 2025 year end
OfficerAwardUnvested unitsMarket value of unvested unitsExercise priceExpires
Ramil YaldaeiPSU◇◇——
PSU◇◇——
PSU◇◇——
PSU◇◇——
PSU◇◇——
Ido DolevPSU◇◇——
PSU◇◇——
Brian RobertsPSU◇◇——
Michael PlisinskiPSU◇◇——
PSU◇◇——
PSU◇◇——
PSU◇◇——
PSU◇◇——
Mark SlicerPSU◇◇——
PSU◇◇——
Shirley ChenPSU◇◇——
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero.

Severance and change in control

The terms as written in the agreements.
Brian Roberts
Chief Financial Officer · Employment agreement
Severance multiple◇
Severance base◇
Change-in-control multiple◇
Equity acceleration on change in control◇
Benefits continuation on change in control◇
Benefits continuation◇
Non-compete period◇
Non-solicit period◇
Clawback◇
Ido Dolev
Executive Vice President, Product Solutions Group · Change-in-control agreement
Severance multiple◇
Severance base◇
Change-in-control multiple◇
Equity acceleration on change in control◇
Benefits continuation on change in control◇
Benefits continuation◇
Excise tax treatment◇
Shirley Chen
Senior Vice President, Customer Success · Change-in-control agreement
Severance multiple◇
Severance base◇
Change-in-control multiple◇
Equity acceleration on change in control◇
Benefits continuation on change in control◇
Benefits continuation◇
Excise tax treatment◇

Director compensation

What each non-employee director was paid.
Fiscal 2025
DirectorFees earned in cashStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Christopher A. Seams
Board chair
◇◇————◇
Susan D. Lynch
◇◇————◇
May Su
◇◇————◇
David B. Miller
◇◇————◇
Stephen D. Kelley
◇◇————◇
Stephen S. Schwartz
◇◇————◇
Christine A. Tsingos
◇—————◇
Leo Berlinghieri
◇—————◇
Michael P. Plisinski served on the board in fiscal 2025 and received no compensation for board service. Executive directors are typically paid through their executive roles, shown above.
Earlier years are included in the PDF.
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero.

Director fee schedule

The standing retainers and premiums the board pays, as published.
Board cash retainer◇
Board equity retainer◇
Total board retainer◇
Board chair premium◇
Lead independent director premium◇
Audit committee chair◇
Audit committee member◇
Compensation committee chair◇
Compensation committee member◇
Nominating and governance chair◇
Nominating and governance member◇
Equity is delivered as restricted stock units.
Stock ownership guideline: 3x annual retainer ($210,000)

Disclosed peer group

The companies this board named as its compensation comparison group. The list is disclosure; the comparison is analysis.
Fiscal 2025
  • Advanced Energy Industries Inc. AEIS
  • Allegro MicroSystems, Inc. ALGM
  • Axcelis Technologies, Inc. ACLS
  • Cognex Corporation CGNX
  • Cohu, Inc. COHU
  • Entegris, Inc. ENTG
  • FormFactor, Inc. FORM
  • IPG Photonics Corporation IPGP
  • Lattice Semiconductor Corporation LSCC
  • MACOM Technology Solutions Holdings, Inc. MTSI
  • Monolithic Power Systems, Inc. MPWR
  • Novanta Inc. NOVT
  • Power Integrations, Inc. POWI
  • Silicon Laboratories Inc. SLAB
  • Synaptics Incorporated SYNA
  • Teradyne, Inc. TER
  • Veeco Instruments Inc. VECO

Say-on-pay history

Shareholder support for the compensation program, by year.
YearMeetingSupportVotes forVotes againstAbstentions
2025May 20, 2026=◇◇◇
2024May 21, 2025=◇◇◇
2023May 22, 2024=◇◇◇
2022May 9, 2023=◇◇◇
2021May 10, 2022=◇◇◇
2020May 11, 2021=◇◇◇
2019May 12, 2020=◇◇◇
2017May 22, 2018=◇◇◇
2016May 23, 2017=◇◇◇
2015May 24, 2016=◇◇◇

Chief executive pay ratio

As calculated and reported by the company.
Ratio
◇
Median employee compensation
◇
Chief executive total compensation
◇
Email me this page as a cited PDF
The same figures, the same citations, formatted to hand to a committee. Nothing is added that is not on this page.
Your address is used for this and nothing else. Unsubscribe in one click.
Tell me when Onto Innovation files
You get a note when this company’s compensation data changes.
Your address is used for this and nothing else. Unsubscribe in one click.

What this page does not include

Everything above is a fact Onto Innovation disclosed, and it is free. Everything below is our analysis of those facts, and it is not.
Peer benchmarking
Where Onto Innovation sits against its disclosed peers — percentile position by role and by pay element, and the ranking behind it. The disclosed peer group is free; comparisons across it are part of the Velarion platform.
Executive Compensation Report — $1,500
Written compensation analysis
A read of the pay program as designed and as paid: incentive structure, goal rigor, the alignment between the committee's stated philosophy and what the numbers show.
Executive Compensation Report — $1,500
Board and governance analysis
Committee composition, independence, director pay positioning, and the governance provisions read together rather than listed.
Board Governance Report — $1,200
Realizable pay
What the awards above are actually worth today against what they were valued at on grant, and what the gap says about the pay-for-performance link.
Velarion Intelligence
Adviser switching and vote outcomes
Two datasets covering compensation-adviser changes and what followed a contested vote. Both are part of the Velarion platform.
Inquire about access
Multiple companies at once
Cross-company views, cohort screens, and data export across the industries we cover. This page is one company; the platform is all of them.
Velarion Intelligence
Join the list for a Velarion Pro seat
Full platform access for one person: every industry we cover, peer positioning, and the written analysis. We will email you when it opens.
Your address is used for this and nothing else. Unsubscribe in one click.
Join the list for Peer Group Review
Whether Onto Innovation's disclosed peer group is defensible, who names Onto Innovation back in their own benchmarking group, and how pay tracks performance across it. This is the analysis a compensation consultant delivers on the group above. We will email you when it opens.
Your address is used for this and nothing else. Unsubscribe in one click.

Citations

Every figure on this page is cited to the document that reported it. Select any figure to see its citation.
288 figures on this page: 278 cited to the filing that reported them, 10 calculated from figures it prints.
278 cited to the filing
10 calculated from the filing

Documents cited

  1. 0001193125-26-232522
  2. 0001193125-26-143699
    CEO Pay Ratio · EXECUTIVE COMPENSATION TABLES · Grants of Plan-Based Awards · NOMINEES FOR DIRECTOR & · and 1 more section
  3. 0000950170-25-086558
    EX-10.1
  4. 0000950170-25-075756
  5. 0000950170-25-052319
    Summary Compensation Table
  6. 0000950170-24-063488
  7. 0000950170-23-019788
  8. 0000950170-23-010940
    Summary Compensation Table
  9. 0000950170-23-004283
    Employment Agreement
  10. 0001564590-22-019325
  11. 0001564590-21-026642
  12. 0001564590-20-025340
    Item 5.07 Submission of Matters to a Vote of Security Holders
  13. 0001564590-18-014357
  14. 0001564590-17-011645
  15. 0001564590-16-019959
    Item 5.07 Submission of Matters to a Vote of Security Holders
Cite this data
This page is free to cite. Attribution we ask for:
Velarion, “Onto Innovation executive compensation, FY2022–FY2025.” https://intel.velarion.ai/comp/ONTO (accessed 2026).
Short form: data: Velarion

The Onto Innovation brief, $1,500

Positioning against its disclosed peers, the governance read, incentive design, and the CD&A alignment analysis; the full peer table; a committee-ready PDF.
From $1,200 for the board report; $2,400 for both.
Get the executive briefGet the board briefNo account needed.
15 filings cited on this page
Method: intel.velarion.ai/methodology
A report that fails to generate is refunded in full
Published by Velarion Company Intelligence
Embed this data
A small, cited view of this data for your own page or newsletter. Every embed carries a visible link back here, so the attribution travels with it.
The headline figures, each with its citation.
Connect an AI assistant
Ask your own assistant about Onto Innovation and roughly 3,000 other US public companies, and get back the same figures on this page with the same citations. Free read access, no account. Add this to your assistant's connector settings.
Setup guide and the full list of questions it answers

Peers Onto Innovation discloses

The companies named in ONTO's own disclosed peer group.

Advanced Energy Industries Inc.Allegro MicroSystems, Inc.Axcelis Technologies, Inc.Cognex CorporationCohu, Inc.Entegris, Inc.FormFactor, Inc.IPG Photonics CorporationLattice Semiconductor CorporationMACOM Technology Solutions Holdings, Inc.Monolithic Power Systems, Inc.Novanta Inc.Power Integrations, Inc.Silicon Laboratories Inc.Synaptics IncorporatedTeradyne, Inc.Veeco Instruments Inc.

Terms on this page

Say-on-Pay VoteCEO Pay RatioMedian Employee CompensationAll companies

Free to read and cite. Redistribution or bulk use of the dataset requires a data license. Talk to us about the data license.

Cite this data
APA
Velarion Company Intelligence. (2026). Velarion database: executive and board compensation data (Version 2026Q3) [Data set]. Zenodo. https://doi.org/10.5281/zenodo.22283854
BibTeX
@misc{velarionData2026,
  author = {{Velarion Company Intelligence}},
  title = {Velarion database: executive and board compensation data},
  year = {2026},
  version = {2026Q3},
  doi = {10.5281/zenodo.22283854},
  publisher = {Zenodo},
  url = {https://doi.org/10.5281/zenodo.22283854}
}
For informational purposes only. Not investment, legal, or compensation advice.  All companies · The Pay Desk · Methodology · Terms · Privacy