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Axcelis Technologies Executive Compensation (FY25)

ACLS · Executive and director compensation, fiscal 2022 to 2025
Data as of September 7, 2026Latest filing (8-K): May 6, 2026
262 figures on this page: 251 cited to the filing that reported them, 11 calculated from figures it prints. See the citations
Russell Low, President and Chief Executive Officer, received $5,100,394 in total compensation for fiscal 2025, and Low's total was 18.8% higher than the $4,293,508 reported for fiscal 2024. Shareholders supported the say-on-pay proposal with 90.6% of votes cast for or against in favor at the meeting held May 5, 2026 for fiscal 2025. Separately, the disclosed peer group names Advanced Energy Industries, Inc., Cohu, Inc., Entegris, Inc., FormFactor, Inc. and Ichor Holdings, Ltd., among others. The fiscal 2025 disclosure covers 6 named executive officers.
Chief executive, fiscal 2025
◇
Russell Low
Median of the other named officers
$1,287,852
5 officers, excluding the chief executive
Latest say-on-pay support
=
May 5, 2026
Chief executive pay ratio
◇
To the median employee
What changed from fiscal 2024 to fiscal 2025
The figures that moved, and by how much. Analysis of these figures is part of the Velarion platform.
Chief executive total compensation — Russell Low: $4,293,508 → $5,100,394 (18.8% higher)
Say-on-pay support: 87.1% → 90.6% (3.5 points higher)

Frequently asked questions

Answers drawn from the data on this page.
Who is Axcelis Technologies' chief executive and what were they paid?
Russell Low, President and Chief Executive Officer, received $5,100,394 in total compensation for fiscal 2025. Low's total was 18.8% higher than the $4,293,508 reported for fiscal 2024.
What was Axcelis Technologies' say-on-pay result?
Shareholders supported the say-on-pay proposal with 90.6% of votes cast for or against in favor at the meeting held May 5, 2026 for fiscal 2025.
Which companies are in Axcelis Technologies' peer group?
The disclosed peer group names Advanced Energy Industries, Inc., Cohu, Inc., Entegris, Inc., FormFactor, Inc. and Ichor Holdings, Ltd., among others.
What is Axcelis Technologies' chief executive pay ratio?
For fiscal 2025, the company reported a chief executive pay ratio of 58:1, against median employee compensation of $87,895.

Executive compensation

Every element reported for each named executive officer, by fiscal year.
Fiscal 2022
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Mary G. Puma
Chief Executive Officer and President
◇—◇—◇—◇◇
Kevin J. Brewer
Executive Vice President, Chief Financial Officer
◇—◇—◇—◇◇
Russell J. Low
Executive Vice President, Global Customer and Engineering Operations
◇—◇—◇—◇◇
Lynnette C. Fallon
Executive Vice President, Chief People and Administrative Officer
◇—◇—◇—◇◇
Douglas Lawson
Executive Vice President, Chief Commercial Officer
◇—◇—◇—◇◇
Fiscal 2023
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Russell Low
President and Chief Executive Officer
◇—◇—◇—◇◇
Mary Puma
Executive Chairperson (former Principal Executive Officer)
Departed during or after this year
◇—◇—◇—◇◇
James Coogan
Executive Vice President and Chief Financial Officer
◇—◇—◇—◇◇
Lynnette Fallon
Executive Vice President, HR/Legal and General Counsel
◇—◇—◇—◇◇
Gerald Blumenstock
Executive Vice President, Engineering
◇—◇—◇—◇◇
Kevin Brewer
Executive Vice President Finance and Operations (former Principal Financial Officer)
Departed during or after this year
◇—◇—◇—◇◇
Gregory Redinbo
Executive Vice President, Marketing and Applications
◇—◇—◇—◇◇
Fiscal 2024
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Russell Low
President and Chief Executive Officer
◇—◇—◇—◇◇
James Coogan
Executive Vice President and Chief Financial Officer
◇—◇—◇—◇◇
Gerald Blumenstock
Executive Vice President, Research, Development and Engineering
◇—◇—◇—◇◇
Christopher Tatnall
Executive Vice President, Global Customer Operations
◇—◇—◇—◇◇
Gregory Redinbo
Executive Vice President, Marketing and Applications
◇—◇—◇—◇◇
Fiscal 2025
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Russell Low
President and Chief Executive Officer
◇—◇—◇—◇◇
James Coogan
Executive Vice President and Chief Financial Officer
◇—◇—◇—◇◇
Eileen Evans
Executive Vice President, HR and Legal, and General Counsel
◇—◇—◇—◇◇
Christopher Tatnall
Executive Vice President, Global Customer Operations
◇—◇—◇—◇◇
Gregory Redinbo
Executive Vice President, Marketing and Applications
◇—◇—◇—◇◇
Gerald Blumenstock
Executive Vice President, Research, Development, and Engineering
◇—◇—◇—◇◇
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero. A negative change in pension value is shown but, as the company reports it, not included in the total.

Equity awards granted

Individual awards as disclosed: type, date, unit counts at each level, and grant date value.
Fiscal 2025
OfficerAwardGrant dateThreshold unitsTarget unitsUnits grantedMaximum unitsExercise priceGrant date fair value
Christopher J. TatnallRSU◇——◇——◇
Christopher J. TatnallPSU◇◇◇—◇—◇
Eileen J. EvansPSU◇◇◇—◇—◇
Eileen J. EvansRSU◇——◇——◇
Gerald M. BlumenstockRSU◇——◇——◇
Gerald M. BlumenstockPSU◇◇◇—◇—◇
Gregory F. RedinboPSU◇◇◇—◇—◇
Gregory F. RedinboRSU◇——◇——◇
James G. CooganPSU◇◇◇—◇—◇
James G. CooganRSU◇——◇——◇
Russell J. LowRSU◇——◇——◇
Russell J. LowPSU◇◇◇—◇—◇
Fiscal 2023, 2024 are included in the PDF.
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero. Threshold, target and maximum apply only to performance awards and are never shown for time-based or option awards.

Outstanding awards

Awards still held at fiscal year end.
As disclosed at fiscal 2025 year end
OfficerAwardUnvested unitsMarket value of unvested unitsExercise priceExpires
Russell LowPSU◇◇——
RSU◇◇——
James CooganPSU◇◇——
RSU◇◇——
Eileen EvansRSU◇◇——
PSU◇◇——
Christopher TatnallRSU◇◇——
PSU◇◇——
Gregory RedinboRSU◇◇——
PSU◇◇——
Gerald BlumenstockRSU◇◇——
PSU◇◇——
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero.

Director compensation

What each non-employee director was paid.
Fiscal 2025
DirectorFees earned in cashStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Jorge Titinger
Board chair
◇◇————◇
John T. Kurtzweil
◇◇————◇
Jeanne Quirk
◇◇————◇
Necip Sayiner
◇◇————◇
Thomas St. Dennis
◇◇————◇
Tzu-Yin Chiu
◇◇————◇
Russell J. Low and Gregory B. Graves served on the board in fiscal 2025 and received no compensation for board service. Executive directors are typically paid through their executive roles, shown above.
Earlier years are included in the PDF.
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero.

Director fee schedule

The standing retainers and premiums the board pays, as published.
Board cash retainer◇
Board equity retainer◇
Total board retainer◇
Lead independent director premium◇
Audit committee chair◇
Audit committee member◇
Compensation committee chair◇
Compensation committee member◇
Nominating and governance chair◇
Nominating and governance member◇
Equity is delivered as restricted stock units.

Disclosed peer group

The companies this board named as its compensation comparison group. The list is disclosure; the comparison is analysis.
Fiscal 2025
  • Advanced Energy Industries, Inc. AEIS
  • Cohu, Inc. COHU
  • Entegris, Inc. ENTG
  • FormFactor, Inc. FORM
  • Ichor Holdings, Ltd. ICHR
  • IPG Photonics Corporation IPGP
  • Kulicke and Soffa Industries, Inc. KLIC
  • MKS Instruments, Inc. MKSI
  • Novanta Inc. NOVT
  • Onto Innovation Inc. ONTO
  • OSI Systems, Inc. OSIS
  • Photronics, Inc. PLAB
  • Ultra Clean Holdings, Inc. UCTT
  • Veeco Instruments Inc. VECO
  • Viavi Solutions Inc. VIAV

Say-on-pay history

Shareholder support for the compensation program, by year.
YearMeetingSupportVotes forVotes againstAbstentions
2025May 5, 2026=◇◇◇
2024May 7, 2025=◇◇◇
2023May 9, 2024=◇◇◇
2022May 11, 2023=◇◇◇
2021May 10, 2022=◇◇◇
2020May 12, 2021=◇◇◇
2019May 19, 2020=◇◇◇
2018May 14, 2019=◇◇◇
2017May 16, 2018=◇◇◇
2016May 16, 2017=◇◇◇
2015May 4, 2016=◇◇◇

Chief executive pay ratio

As calculated and reported by the company.
Ratio
◇
Median employee compensation
◇
Chief executive total compensation
◇
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What this page does not include

Everything above is a fact Axcelis Technologies disclosed, and it is free. Everything below is our analysis of those facts, and it is not.
Peer benchmarking
Where Axcelis Technologies sits against its disclosed peers — percentile position by role and by pay element, and the ranking behind it. The disclosed peer group is free; comparisons across it are part of the Velarion platform.
Executive Compensation Report — $1,500
Written compensation analysis
A read of the pay program as designed and as paid: incentive structure, goal rigor, the alignment between the committee's stated philosophy and what the numbers show.
Executive Compensation Report — $1,500
Board and governance analysis
Committee composition, independence, director pay positioning, and the governance provisions read together rather than listed.
Board Governance Report — $1,200
Realizable pay
What the awards above are actually worth today against what they were valued at on grant, and what the gap says about the pay-for-performance link.
Velarion Intelligence
Adviser switching and vote outcomes
Two datasets covering compensation-adviser changes and what followed a contested vote. Both are part of the Velarion platform.
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Citations

Every figure on this page is cited to the document that reported it. Select any figure to see its citation.
262 figures on this page: 251 cited to the filing that reported them, 11 calculated from figures it prints.
251 cited to the filing
11 calculated from the filing

Documents cited

  1. 0001104659-26-056230
  2. 0001104659-26-037356
    2025 Summary Compensation Table · BOARD OF DIRECTORS · Director Compensation · Grants of Plan-Based Awards
  3. 0001104659-25-046247
    Item 5.07 Submission of Matters to a Vote of Security Holders
  4. 0001104659-25-029630
    2024 Summary Compensation Table
  5. 0001104659-24-059307
  6. 0001104659-24-040855
    2023 Summary Compensation Table
  7. 0001104659-23-059495
  8. 0001104659-23-039635
    Summary Compensation Table
  9. 0001104659-22-058781
  10. 0001104659-21-065918
  11. 0001104659-20-064529
  12. 0001104659-19-029718
  13. 0001104659-18-034314
  14. 0001104659-17-033475
    Item 5.07 Submission of Matters to a Vote of Security Holders
  15. 0001104659-16-118131
    Item 5.07 Submission of Matters to a Vote of Security Holders
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Velarion, “Axcelis Technologies executive compensation, FY2022–FY2025.” https://intel.velarion.ai/comp/ACLS (accessed 2026).
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Tech — Hardware rankings

Chief executive pay — Tech — HardwareCEO pay ratio — Tech — HardwareSay-on-pay support — Tech — Hardware

Peers Axcelis Technologies discloses

The companies named in ACLS's own disclosed peer group.

Advanced Energy Industries, Inc.Cohu, Inc.FormFactor, Inc.Ichor Holdings, Ltd.IPG Photonics CorporationKulicke and Soffa Industries, Inc.OSI Systems, Inc.Photronics, Inc.Ultra Clean Holdings, Inc.Veeco Instruments Inc.Viavi Solutions Inc.

Terms on this page

Say-on-Pay VoteCEO Pay RatioMedian Employee CompensationAll companies
Cite this data
APA
Velarion Company Intelligence. (2026). Velarion database: executive and board compensation data (Version 2026Q3) [Data set]. Zenodo. https://doi.org/10.5281/zenodo.22283854
BibTeX
@misc{velarionData2026,
  author = {{Velarion Company Intelligence}},
  title = {Velarion database: executive and board compensation data},
  year = {2026},
  version = {2026Q3},
  doi = {10.5281/zenodo.22283854},
  publisher = {Zenodo},
  url = {https://doi.org/10.5281/zenodo.22283854}
}
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