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KLA Executive Compensation (FY26)

KLAC · Executive and director compensation, fiscal 2022 to 2026
Chief executive, fiscal 2026
◇
Richard Wallace
Latest say-on-pay support
=
November 5, 2025
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Data as of October 22, 2026Latest filing (DEF 14A): September 22, 2026
14 filings cited on this page
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389 figures on this page: 379 cited to the filing that reported them, 10 calculated from figures it prints. See the citations

More on KLA

Five data products on this company. Each one is requested through the developer setup page.
What changed from fiscal 2025 to fiscal 2026
The figures that moved, and by how much. Analysis of these figures is part of the Velarion platform.
Chief executive total compensation — Richard Wallace: $25,104,584 → $29,954,476 (19.3% higher)
Say-on-pay support: 92.5% → 92.4% (0.1 points lower)

Frequently asked questions

Answers drawn from the data on this page.
Who is KLA's chief executive and what were they paid?
Total compensation for Richard Wallace, President & Chief Executive Officer, came to $29,954,476 in fiscal 2026. Compared with the $25,104,584 reported for fiscal 2025, Wallace's total was 19.3% higher.
What was KLA's say-on-pay result?
For fiscal 2025, shareholders backed the say-on-pay proposal with 92.4% of votes cast for or against in favor at the meeting held November 5, 2025.
Which companies are in KLA's peer group?
Companies named in the disclosed peer group include Advanced Micro Devices, Inc., Analog Devices, Inc., Applied Materials, Inc., Corning Incorporated and GLOBALFOUNDRIES Inc., among others.

Executive compensation

Every element reported for each named executive officer, by fiscal year.
Fiscal 2022
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Richard Wallace
President and Chief Executive Officer
◇—◇—◇—◇◇
Ahmad Khan
Executive Vice President, Chief Operating Officer
◇—◇—◇—◇◇
Bren Higgins
Executive Vice President and Chief Financial Officer
◇—◇—◇—◇◇
Mary Beth Wilkinson
Executive Vice President, Chief Legal Officer & Corporate Secretary
◇—◇—◇—◇◇
Oreste Donzella
Executive Vice President, Chief Marketing Officer
◇◇◇—◇—◇◇
Brian Lorig
Executive Vice President, Chief Customer Officer
◇—◇—◇—◇◇
Fiscal 2023
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Richard Wallace
President & Chief Executive Officer
◇—◇—◇—◇◇
Ahmad Khan
President, Semiconductor Products and Customers
◇—◇—◇—◇◇
Bren Higgins
Executive Vice President & Chief Financial Officer
◇—◇—◇—◇◇
Oreste Donzella
Former Executive Vice President and Chief Strategy Officer
◇—◇—◇—◇◇
Brian Lorig
Executive Vice President, KLA Global Services
◇—◇—◇—◇◇
Mary Beth Wilkinson
Executive Vice President, Chief Legal Officer & Corporate Secretary
◇—◇—◇—◇◇
Fiscal 2024
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Richard Wallace
President & Chief Executive Officer
◇—◇—◇—◇◇
Oreste Donzella
Former Executive Vice President and Chief Strategy Officer
◇—◇—◇—◇◇
Bren Higgins
Executive Vice President & Chief Financial Officer
◇—◇—◇—◇◇
Ahmad Khan
President, Semiconductor Products and Customers
◇—◇—◇—◇◇
Brian Lorig
Executive Vice President, KLA Global Services
◇—◇—◇—◇◇
Mary Beth Wilkinson
Executive Vice President, Chief Legal Officer & Corporate Secretary
◇—◇—◇—◇◇
Fiscal 2025
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Richard Wallace
President & Chief Executive Officer
◇—◇—◇—◇◇
Bren Higgins
Executive Vice President & Chief Financial Officer
◇—◇—◇—◇◇
Ahmad Khan
President, Semiconductor Products and Customers
◇—◇—◇—◇◇
Oreste Donzella
Former Executive Vice President and Chief Strategy Officer
Departed during or after this year
◇—◇—◇—◇◇
Brian Lorig
Executive Vice President, KLA Global Services
◇—◇—◇—◇◇
Mary Beth Wilkinson
Executive Vice President, Chief Legal Officer & Corporate Secretary
◇—◇—◇—◇◇
Fiscal 2026
OfficerSalaryBonusStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Richard Wallace
President & Chief Executive Officer
◇—◇—◇—◇◇
Bren Higgins
Executive Vice President & Chief Financial Officer
◇—◇—◇—◇◇
Ahmad Khan
President, Semiconductor Products and Customers
◇—◇—◇—◇◇
Brian Lorig
Executive Vice President, KLA Global Services
◇—◇—◇—◇◇
Mary Beth Wilkinson
Executive Vice President, Chief Legal Officer & Corporate Secretary
◇—◇—◇—◇◇
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero. A negative change in pension value is shown but, as the company reports it, not included in the total.

Equity awards granted

Individual awards as disclosed: type, date, unit counts at each level, and grant date value.
Fiscal 2025
OfficerAwardGrant dateThreshold unitsTarget unitsUnits grantedMaximum unitsExercise priceGrant date fair value
Ahmad KhanPSU◇◇◇—◇—◇
Ahmad KhanRSU◇——◇——◇
Bren HigginsPSU◇◇◇—◇—◇
Bren HigginsRSU◇——◇——◇
Brian LorigRSU◇——◇——◇
Brian LorigPSU◇◇◇—◇—◇
Mary Beth WilkinsonPSU◇◇◇—◇—◇
Mary Beth WilkinsonRSU◇——◇——◇
Oreste DonzellaPSU◇◇◇—◇—◇
Oreste DonzellaRSU◇——◇——◇
Richard WallacePSU◇◇◇—◇—◇
Richard WallaceRSU◇——◇——◇
Fiscal 2022, 2023, 2024 are included in the PDF.
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero. Threshold, target and maximum apply only to performance awards and are never shown for time-based or option awards.

Outstanding awards

Awards still held at fiscal year end.
As disclosed at fiscal 2026 year end
OfficerAwardUnvested unitsMarket value of unvested unitsExercise priceExpires
Brian LorigPSU◇◇——
PSU◇◇——
PSU◇◇——
PSU◇◇——
RSU◇◇——
RSU◇◇——
RSU◇◇——
RSU◇◇——
RSU◇◇——
Bren HigginsPSU◇◇——
RSU◇◇——
PSU◇◇——
PSU◇◇——
PSU◇◇——
RSU◇◇——
RSU◇◇——
RSU◇◇——
RSU◇◇——
Richard WallacePSU◇◇——
RSU◇◇——
PSU◇◇——
PSU◇◇——
PSU◇◇——
RSU◇◇——
RSU◇◇——
RSU◇◇——
RSU◇◇——
Ahmad KhanPSU◇◇——
RSU◇◇——
PSU◇◇——
PSU◇◇——
PSU◇◇——
RSU◇◇——
RSU◇◇——
RSU◇◇——
RSU◇◇——
Mary Beth WilkinsonRSU◇◇——
PSU◇◇——
PSU◇◇——
PSU◇◇——
PSU◇◇——
RSU◇◇——
RSU◇◇——
RSU◇◇——
RSU◇◇——
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero.

Severance and change in control

The terms as written in the agreements.
Ahmad Khan
President, Semiconductor Products and Customers · Terms as described in the company’s compensation discussion · citing a 2025 filing
Change-in-control multiple◇
Change-in-control base◇
Bren Higgins
Executive Vice President & Chief Financial Officer · Terms as described in the company’s compensation discussion · citing a 2025 filing
Change-in-control multiple◇
Change-in-control base◇
Equity acceleration on change in control◇
Brian Lorig
Executive Vice President, KLA Global Services · Terms as described in the company’s compensation discussion · citing a 2025 filing
Change-in-control multiple◇
Change-in-control base◇
Equity acceleration on change in control◇
Mary Beth Wilkinson
Executive Vice President, Chief Legal Officer & Corporate Secretary · Terms as described in the company’s compensation discussion · citing a 2025 filing
Change-in-control multiple◇
Change-in-control base◇
Equity acceleration on change in control◇
Richard Wallace
President & Chief Executive Officer · Terms as described in the company’s compensation discussion · citing a 2025 filing
Severance multiple◇
Severance base◇
Change-in-control multiple◇
Equity acceleration on change in control◇

Director compensation

What each non-employee director was paid.
Fiscal 2026
DirectorFees earned in cashStock awardsOption awardsNon-equity incentivePension and deferred earningsAll other compensationTotal
Robert Calderoni
Board chair
◇◇———◇◇
Kevin Kennedy
◇◇———◇◇
Michael McMullen
◇◇———◇◇
Victor Peng
◇◇———◇◇
Jeneanne Hanley
◇◇———◇◇
Jamie Samath
◇◇———◇◇
Susan Taylor
◇◇———◇◇
Tracy Embree
◇◇————◇
Jason Conley
◇◇————◇
Gary Moore
◇————◇◇
Emiko Higashi
◇————◇◇
Richard Wallace served on the board in fiscal 2026 and received no compensation for board service. Executive directors are typically paid through their executive roles, shown above.
Earlier years are included in the PDF.
A dash means the company reported no figure in that column. $0 is shown only where the filing prints a zero.

Director fee schedule

The standing retainers and premiums the board pays, as published.
Board cash retainer◇
Board equity retainer◇
Total board retainer◇
Board chair premium◇
Audit committee chair◇
Audit committee member◇
Compensation committee chair◇
Compensation committee member◇
Nominating and governance chair◇
Nominating and governance member◇
Equity is delivered as restricted stock units.

Disclosed peer group

The companies this board named as its compensation comparison group. The list is disclosure; the comparison is analysis.
Fiscal 2026
  • Advanced Micro Devices, Inc. AMD
  • Analog Devices, Inc. ADI
  • Applied Materials, Inc. AMAT
  • Corning Incorporated GLW
  • GLOBALFOUNDRIES Inc. symbol not shown
  • Keysight Technologies, Inc. KEYS
  • Lam Research Corporation LRCX
  • Marvell Technology Inc. MRVL
  • Microchip Technology, Inc. MCHP
  • Micron Technology, Inc. MU
  • MKS Inc. MKSI
  • ON Semiconductor Corp. ON
  • Qorvo, Inc. QRVO
  • Qualcomm Incorporated QCOM
  • Skyworks Solutions, Inc. SWKS
  • Texas Instruments Incorporated TXN

Say-on-pay history

Shareholder support for the compensation program, by year.
YearMeetingSupportVotes forVotes againstAbstentions
2025November 5, 2025=◇◇◇
2024November 6, 2024=◇◇◇
2023November 1, 2023=◇◇◇
2022November 2, 2022=◇◇◇
2021November 3, 2021=◇◇◇
2020November 4, 2020=◇◇◇
2019November 5, 2019=◇◇◇
2018November 7, 2018=◇◇◇
2017November 1, 2017=◇◇◇
2016November 2, 2016=◇◇◇

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- Richard Wallace (President & Chief Executive Officer), FY2026 total compensation $29,954,476 (base salary $1,285,385) [exec_comp, SEC accession 0001193125-26-397898, filed 2026-09-22]

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What this page does not include

Everything above is a fact KLA disclosed, and it is free. Everything below is our analysis of those facts, and it is not.
Peer benchmarking
Where KLA sits against its disclosed peers — percentile position by role and by pay element, and the ranking behind it. The disclosed peer group is free; comparisons across it are part of the Velarion platform.
Executive Compensation Report — $1,500
Written compensation analysis
A read of the pay program as designed and as paid: incentive structure, goal rigor, the alignment between the committee's stated philosophy and what the numbers show.
Executive Compensation Report — $1,500
Board and governance analysis
Committee composition, independence, director pay positioning, and the governance provisions read together rather than listed.
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Realizable pay
What the awards above are actually worth today against what they were valued at on grant, and what the gap says about the pay-for-performance link.
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Citations

Every figure on this page is cited to the document that reported it. Select any figure to see its citation.
389 figures on this page: 379 cited to the filing that reported them, 10 calculated from figures it prints.
379 cited to the filing
10 calculated from the filing

Documents cited

  1. 0001193125-26-397898
    Director Compensation · Outstanding Equity Awards at Fiscal Year End · Summary Compensation Table
  2. 0001193125-25-272448
  3. 0001193125-25-213294
    Compensation Discussion and Analysis · Grants of Plan-Based Awards · Summary Compensation Table
  4. 0001193125-24-254154
  5. 0001193125-23-270369
    Item 5.07 Submission of Matters to a Vote of Security Holders
  6. 0001193125-23-239572
    Summary Compensation Table
  7. 0001193125-22-277886
  8. 0001193125-22-249165
    Summary Compensation Table
  9. 0001628280-21-022013
    Item 5.07 Submission of Matters to a Vote of Security Holders
  10. 0000319201-20-000061
  11. 0001628280-19-013821
  12. 0001628280-18-013994
  13. 0000319201-17-000047
  14. 0000319201-16-000108
Cite this data
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Velarion, “KLA executive compensation, FY2022–FY2026.” https://intel.velarion.ai/comp/KLAC (accessed 2026).
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The paid brief for KLA

Positioning against its disclosed peers, the governance read, incentive design, and the CD&A alignment analysis; the full peer table; a committee-ready PDF.
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14 filings cited on this page
Method: intel.velarion.ai/methodology
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Tech — Hardware rankings

Chief executive pay — Tech — HardwareCEO pay ratio — Tech — HardwareSay-on-pay support — Tech — Hardware

Peers KLA discloses

The companies named in KLAC's own disclosed peer group.

Advanced Micro Devices, Inc.Analog Devices, Inc.Applied Materials, Inc.Corning IncorporatedKeysight Technologies, Inc.Lam Research CorporationMarvell Technology Inc.Microchip Technology, Inc.Micron Technology, Inc.MKS Inc.ON Semiconductor Corp.Qorvo, Inc.Qualcomm IncorporatedSkyworks Solutions, Inc.Texas Instruments Incorporated

Terms on this page

Say-on-Pay VoteCEO Pay RatioMedian Employee CompensationAll companies

Free to read and cite. Redistribution or bulk use of the dataset requires a data license. Talk to us about the data license.

Cite this data
APA
Velarion Company Intelligence. (2026). Velarion database: executive and board compensation data (Version 2026Q3) [Data set]. Zenodo. https://doi.org/10.5281/zenodo.22283854
BibTeX
@misc{velarionData2026,
  author = {{Velarion Company Intelligence}},
  title = {Velarion database: executive and board compensation data},
  year = {2026},
  version = {2026Q3},
  doi = {10.5281/zenodo.22283854},
  publisher = {Zenodo},
  url = {https://doi.org/10.5281/zenodo.22283854}
}
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